Fully integrated nano-opto-electro-mechanical wavelength and displacement sensor

Z. Zobenica, R. W. van der Heijden, M. Petruzzella, F. Pagliano, R. Leijssen, T. Xia, L. Midolo, M. Cotrufo, Y. J. Cho, F. W.M. van Otten, E. Verhagen, A. Fiore

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review


We report a high resolution wavelength and displacement sensor based on an electromechanically tuneable photonic crystal cavity, where sensing, actuation and electrical readout are integrated together in the same device.

Original languageEnglish
Title of host publicationOptical Sensors, Sensors 2016
PublisherOSA - The Optical Society
ISBN (Print)9781943580149
Publication statusPublished - 21 Jul 2014
EventOptical Sensors, Sensors 2016 - Vancouver, Canada
Duration: 18 Jul 201620 Jul 2016


ConferenceOptical Sensors, Sensors 2016

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