TY - JOUR
T1 - Field-position dependent apodization in dark-field digital holographic microscopy for semiconductor metrology
AU - van Gardingen-Cromwijk, Tamar
AU - Adhikary, Manashee
AU - Messinis, Christos
AU - Konijnenberg, Sander
AU - Coene, Wim
AU - Witte, Stefan
AU - de Boer, Johannes F.
AU - den Boef, Arie
N1 - Funding Information: We would like to thank Teus Tukker, Armand Koolen, both part of ASML Research, Marco Konijnenburg, Head Software Engineering group of AMOLF/ARCNL, and Bartjan Spaanderman, technician of Computational Imaging group of ARCNL for their support and valuable contribution to this project. We also greatfully acknowledge Rob Heeman, Klaas Paulusse, and Arthur van der Put of Anteryon for reviewing the lens description in this paper and providing information on the replication process. Publisher Copyright: © 2022 Optica Publishing Group under the terms of the Optica Open Access Publishing Agreement.
PY - 2023/1/2
Y1 - 2023/1/2
N2 - Measuring overlay between two layers of semiconductor devices is a crucial step during electronic chip fabrication. We present dark-field digital holographic microscopy that addresses various overlay metrology challenges that are encountered in the semiconductor industry. We present measurement results that show that the point-spread function of our microscope depends on the position in the field-of-view. We will show that this novel observation can be explained by a combination of the finite bandwidth of the light source and a wavelength-dependent focal length of the imaging lens. Moreover, we will also present additional experimental data that supports our theoretical understanding. Finally, we will propose solutions that reduce this effect to acceptable levels.
AB - Measuring overlay between two layers of semiconductor devices is a crucial step during electronic chip fabrication. We present dark-field digital holographic microscopy that addresses various overlay metrology challenges that are encountered in the semiconductor industry. We present measurement results that show that the point-spread function of our microscope depends on the position in the field-of-view. We will show that this novel observation can be explained by a combination of the finite bandwidth of the light source and a wavelength-dependent focal length of the imaging lens. Moreover, we will also present additional experimental data that supports our theoretical understanding. Finally, we will propose solutions that reduce this effect to acceptable levels.
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U2 - https://doi.org/10.1364/OE.476157
DO - https://doi.org/10.1364/OE.476157
M3 - Article
C2 - 36606976
SN - 1094-4087
VL - 31
SP - 411
EP - 425
JO - Optics express
JF - Optics express
IS - 1
ER -