@inproceedings{c56393daa2494da8b52c3cf421f72159,
title = "Lens aberration calibration and correction with plasmonic nanoparticles in off-axis dark-field digital holographic microscope for semiconductor metrology",
abstract = "We present a method to calibrate and correct lens aberrations in dark-field Digital Holographic Microscope (df-DHM). In this method a gold nanoparticle is used to measure the point-spread function (PSF) of the df-DHM.",
author = "C. Messinis and {van Schaijk}, {T. T.M.} and N. Pandey and A. Koolen and {de Boer}, {J. F.} and S. Witte and {den Boef}, {A. J.}",
note = "Publisher Copyright: {\textcopyright} OSA 2021, {\textcopyright} 2021 The Author(s); Computational Optical Sensing and Imaging, COSI 2021 - Part of OSA Imaging and Applied Optics Congress 2021 ; Conference date: 19-07-2021 Through 23-07-2021",
year = "2021",
language = "English",
series = "Optics InfoBase Conference Papers",
publisher = "OSA - The Optical Society",
booktitle = "Computational Optical Sensing and Imaging 2021 (COSI)",
address = "United States",
}