TY - GEN
T1 - Parallel acquisition of multiple images using coherence gating in off-axis dark-field digital holographic microscope for semiconductor metrology
AU - Messinis, C.
AU - van Schaijk, T. T.M.
AU - Tenner, V. T.
AU - de Boer, J. F.
AU - Witte, S.
AU - den Boef, A. J.
N1 - Publisher Copyright: © 2020 The Author(s)
PY - 2020
Y1 - 2020
N2 - We present an Off-Axis dark-field digital holographic microscope capable of parallel acquisition of multiple holograms. With this microscope we aim to measure overlay (OV) with sub-nanometer precision and milli-second acquisition times over large wavelength range.
AB - We present an Off-Axis dark-field digital holographic microscope capable of parallel acquisition of multiple holograms. With this microscope we aim to measure overlay (OV) with sub-nanometer precision and milli-second acquisition times over large wavelength range.
UR - http://www.scopus.com/inward/record.url?scp=85118608056&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=85118608056&partnerID=8YFLogxK
UR - https://www.osapublishing.org/conference.cfm?meetingid=15&yr=2020
M3 - Conference contribution
T3 - Optics InfoBase Conference Papers
BT - Proceedings Imaging and Applied Optics Congress
PB - OSA - The Optical Society
T2 - Computational Optical Sensing and Imaging, COSI 2020 - Part of Imaging and Applied Optics Congress 2020
Y2 - 22 June 2020 through 26 June 2020
ER -